MASS FLOW
MEMS based ultra compact mass flow meters and controllers, modules and systems for OEM applications
INFRARED SOURCES
MEMS based broadband infrared (IR) sources for NDIR gas sensors
LASER GAS DETECTOR
Diode-based laser gas detection (LGD) OEM modules for NH3, CO2, CH4 and O2 in process & emission control, climate and safety
MICRO OPTICS
Fused Silica and Silicon based diffractive and refractive micro optic lenses and lens arrays for applications ranging from UV to IR
MEMS SERVICES
Standard and custom MEMS services offered in a 6” / 8” wafer, class 100 fabrication environment
FLOW CYTOMETRY
Lab-on-chip impedance flow cytometer for label-free single cell analysis