Description
Axetris offers high quality binary & multilevel diffraction gratings in a wide parameter range. Excellent etch depth control, low surface roughness and a high uniformity are key advantages. Applications range from sensors to metrology, spectroscopy and many more.
| Features | Applications |
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Specifications
| Parameter | Value | Comments |
| Operating mode | Transmissive or reflective | |
| Grating periods | 3 μm to > 1 mm | minimum feature size = 1.5 μm |
| Period accuracy | ± 0.25 μm | no cumulative errors |
| Levels | up 2 to 16 | |
| Groove shape | Binary, rectangular | |
| Surface roughness | < 5 nm | rms |
| AR coatings | 0.5% per side | double sided |
| Structured metallization | optional | Au, Cr, Al and others |
| Substrate thickness | Fused Silica: 0.60 mm, 1.0 mm, 1.6 mm Silicon 0.38 mm, 1.0 mm |
custom thicknesses available |
| Materials | Fused Silica | |
| Silicon | ||
| Technical data and specifications are subject to change without prior notice | ||
Diffraction gratings & diffractive optical elements custom made to your specifications