Type |
Output |
Input |
Functionality |
Supply |
Main application / Remarks |
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| Flow | Temp. | PID Control Signal |
Set point | Valve override |
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MFM 2020 | • | • | • | • | • | 12 V | Compact digital meter - For system integration - RS232 TTL and 0…5V |
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| MFM 2120 | • | • | • | • | • | 24 V | Stand - alone digital meter - RS232 and 0..5V |
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| MFM 2130 | • | • | • | • | • | 24 V | Stand - alone digital meter - RS232, 4..20 mA |
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| MFM 2140 | • | • | • | • | 24 V | Stand - alone digital meter - RS485 |
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MFM 2021 | • | • | • | • | • | • | • | • | • | • | 12 V | Compact digital meter module with additional - PID control output - Set point input - Valve override |
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MFC 2022 | • | • | • | • | • | • | • | • | • | • | • | • | 24 V | Compact digital controller module - For system integration - RS232 TTL, 0…5V |
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| MFC 2122 | • | • | • | • | • | • | • | • | • | • | • | 24 V | Stand alone digital controller - RS232, 0…5V |
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| MFC 2132 | • | • | • | • | • | • | • | • | • | • | • | 24 V | Stand - alone digital controller - RS232, 4..20 mA |
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| MFC 2142 | • | • | • | • | • | • | • | • | 24 V | Stand - alone digital controller - RS485 |
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Modules for system integration
MFM 2020: A compact mass flow meter with a digital interface
and 0...5 V analog output. Its small size makes it the ideal choice
when space is a limitation. In addition it is the ideal product to
build customized multi-channel gas metering units. The MFM 2020 also provides temperature along with meter status, and identity information. The digital interface supports configuration of gas, range and meter output response time.
MFM 2021: The advanced mass flow meter MFM 2021 includes
an additional high precision PID controller with analog output, enabling direct, fast and accurate control of gas flows. The additional valve override functionality allows an immediate setting of the valve to the fully open or close position or any value in between.
MFC 2022: A compact mass flow controller created by integrating
a fast acting valve and the driver electronics with the MFM 2021.
It is the ideal choice to build up highly compact gas control systems.
Products for stand alone applications
MFM 21x0:A stand-alone mass flow meter with a complete
housing that provides environmental and electrical protection to
the MFM 2020. It is particular suited to replace conventional mass
flow or volume flow meters. Just like the MFM 2020, the full scale
mass flow and the gas type can be changed via the digital interface.
The following digital/analog interfaces are supported.
MFM 2120: RS232/ 0…5 Volt, MFM 2130: RS232/ 4…20 mA,
MFM 2140: RS485.
MFC 21x2:A stand alone mass flow controller MFC 21x2 contains
an integrated fast acting solenoid valve. Compared to conventional
mass flow controllers it offers a smaller size, higher accuracy,
a shorter settling time, along with multi-range and multi-gas capability.
The following digital/analog interfaces are supported.
MFC 2122: RS232/ 0…5 Volt, MFC 2132: RS 232/ 4…20 mA,
MFC 2142: RS485.
The MFM 2100 and MFC 2100 series is available with D-SUB 9 or M12 electrical connector and with down port or side port gas connector